Model No. VSXP, VSXPM
Compact body with a width of 10.5 mm, a vacuum switching unit that can be compactly installed even for use in multiple stations.
[Effective cross-sectional area of vacuum valve]
2-way valve specification : 3.5, 4.5 (㎟)
3-way valve specification : 3.0, 3.6 (㎟)
